Reimer, Scanning Electron Microscopy, Physics of Image Formation and Microanalysis, 2nd edn. The results show the dependence of the backscattered electron energy distribution as well as the η-values on the differential scattering cross section. The energy distribution of the backscattered electrons emerged from a thin 5 nm C-layer deposited on Au-substrate as well as from a thin 5 nm Au-layer deposited on C-substrate has been investigated as a function of primary electron energy.

The minimum and the maximum on the results are shifted toward the high energies as the top-layer thickness increases.

However, in the case of a thin Au-layer deposited on C-substrate, the backscattering coefficient starts with a value of that of a pure Au and increases to reach its maximum value and then starts decreasing toward the values of the C-substrate. The backscattering coefficient of a thin C-layer deposited on Au-substrate sharply increases toward Au values as the primary electron energy increases following the C bulk values. It depends on the maximum primary electron range compared with the thickness of the deposited top layer. As the top-layer thickness increases and primary electron energy decreases, η-values became more affected by the material of the top layer. In this study a CASINO Monte Carlo model has been used to investigate the behavior of the backscattering coefficient ( η) for C-layer deposited on Au-substrate as well as for Au-layer deposited on C-substrate as a function of top-layer thickness and primary electron energy (0.5–10 keV).

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